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发明名称
SYSTEM AND METHOD FOR INDUCTIVE COUPLING OF AN EXPANDING THERMAL PLASMA
摘要
申请公布号
EP1642314(A2)
申请公布日期
2006.04.05
申请号
EP20040755160
申请日期
2004.06.14
申请人
GENERAL ELECTRIC COMPANY
发明人
SCHAEPKENS, MARC
分类号
C23C16/00;H01J7/24;H01J37/32;H05H1/46;(IPC1-7):H01J37/32
主分类号
C23C16/00
代理机构
代理人
主权项
地址
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