发明名称 POSITION DETECTOR
摘要 PROBLEM TO BE SOLVED: To provide a position detector excluding foreign matters such as dust caught between a contact part of a brush and an electrically conductive pattern part. SOLUTION: At least part of an insulating areas 32 are provided with friction-variable parts 40 made of the same material as that of an electrically conductive areas 31 in such a way as to have approximately the same height from the surface of a substrate 10 as the electrically conductive area 31. The friction-variable parts 40 are discontinuously provided separately from the electrically conductive areas 31 in such a way that the insulating areas 32 and the friction-variable parts 40 may be alternately in contact with each of brushes 21G, 21A and 21B. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006071314(A) 申请公布日期 2006.03.16
申请号 JP20040251831 申请日期 2004.08.31
申请人 NIKON CORP 发明人 KITAOKA NAOKI
分类号 G01D5/245;G03B17/02 主分类号 G01D5/245
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