| 摘要 |
An object of the present invention is to provide a sufficiently high-transparent light transmitting substrate with a transparent conductive film, which is a light transmitting substrate with a transparent conductive film, comprising a light transmitting substrate and a continuous transparent conductive film having a thickness of 12 to 2 nm formed on the light transmitting substrate, and is preferably a light transmitting substrate with a transparent conductive film, wherein the transparent conductive film is made of an aggregate of columnar single crystals, the transparent conductive film has a maximum surface roughness within a range from 1 to 20 nm, the transparent conductive film has an average surface roughness within a range from 0.1 to 10 nm, the transparent conductive film is a thin film made of a tin-doped indium oxide, tin atoms are uniformly distributed in the thin film made of the tin-doped indium oxide, a transmittance to light having a wavelength of 400 nm is 88% or more, a transmittance to light having a wavelength of 350 nm is 85% or more, and a whole light transmittance is 90% or more. |
