| 摘要 |
A self aligned Hall sensor system and method are disclosed. A substrate can be provided. A Hall element and a plurality of contacts can then be formed upon the substrate wherein contacts are located in reference to one another. A field plate formed from polysilicon can then be formed upon the Hall element, wherein the field plate functions as a self-aligning mask for the plurality of contacts such that when the field plate is biased, a number of mobile carriers present at a surface of the field plate are minimized throughout the surface and up to and including the plurality of contacts, thereby minimizing asymmetry and offsets associated with the Hall element.
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