| 摘要 |
A method of fabricating a micro-bridge device ( 14, 16 ) onto a substrate ( 20 ). The method includes the steps of: providing a sacrificial material ( 32 ) on a surface region of the substrate ( 20 ); patternwise etching the sacrificial material ( 32 ); providing a sensing material ( 34 ) on a surface region of the sacrificial material; providing a support material ( 36 ) on a surface region of the sensing material; and removing the sacrificial material ( 32 ) leaving support material ( 36 ) with the sensing material ( 34 ) on its lower surface, substantially free standing above the substrate ( 20 ).
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