| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining method capable of cutting a workpiece at high precision. <P>SOLUTION: In the laser beam machining method, the inside of the plate-like workpiece 1 is irradiated with a laser beam L by placing the focal point P inside the plate-like workpiece 1. At first, a first modification zone 71 to be the starting point of cutting is formed along a first planned cutting line 5a in the workpiece 1. Next, a second modification zone 72 to be the starting point of cutting is formed along a second planned cutting line 5b to be crossed with the planned cutting line 5a so as to be crossed with at least a part of the modification zone 71. Then, a fourth modification zone 73 to be the starting point of cutting is formed along the planned cutting line 5b. Next, a third modification zone 74 to be the starting point of cutting is formed between the modification zone 71 and the incident plane 1a in the workpiece 1 on which the laser beam L is made incident along the planned cutting line 5a so as to be crossed with at least a part of the modification zone 73. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
