| 摘要 |
PROBLEM TO BE SOLVED: To provide a sheet-shaped probe attaining a stable connecting state even for a circuit device having a small-pitch electrode by enabling formation of a small-diameter surface electrode part, providing high durability without causing dropping-out of an electrode structure from an insulating film, and stably keeping a satisfactory connecting state to a large-area wafer or a circuit device having a small-pitch electrode to be inspected by surely preventing positional shift of the electrode structure from the electrode to be inspected due to temperature change in a burn-in test. SOLUTION: The sheet-shaped probe is provided with a contact point film having an insulating film and a plurality of the electrode structures extending in the thickness direction of the insulating film; and a metal-made supporting film for supporting the contact point film. The electrode structure is composed of a front surface electrode part protruding from the front surface of the insulating film, a rear surface electrode part exposing on the rear surface of the insulating film, a short-circuiting part which extends continuously from a base edge of the front surface electrode part in the thickness direction of the insulating film and is connected to the rear surface electrode part, and a supporting part which extends continuously outward from the base edge part of the front surface electrode part along the front surface of the insulating film. COPYRIGHT: (C)2006,JPO&NCIPI
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