发明名称 |
System and method for micro-electromechanical operation of an interferometric modulator |
摘要 |
An interferometric modulator is formed by a stationary layer and a mirror facing the stationary layer. The mirror is movable between the undriven and driven positions. Landing pads, bumps or spring clips are formed on at least one of the stationary layer and the mirror. The landing pads, bumps or spring clips can prevent the stationary layer and the mirror from contacting each other when the mirror is in the driven position. The spring clips exert force on the mirror toward the undriven position when the mirror is in the driven position and in contact with the spring clips.
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申请公布号 |
US2006024880(A1) |
申请公布日期 |
2006.02.02 |
申请号 |
US20050189690 |
申请日期 |
2005.07.26 |
申请人 |
CHUI CLARENCE;CUMMINGS WILLIAM J;GALLY BRIAN J;TUNG MING-HAU |
发明人 |
CHUI CLARENCE;CUMMINGS WILLIAM J.;GALLY BRIAN J.;TUNG MING-HAU |
分类号 |
B81C99/00;H01L21/8238 |
主分类号 |
B81C99/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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