发明名称 |
Film thickness measuring method and measuring apparatus for organic thin film for use in organic electroluminesce device |
摘要 |
A method for measuring a relative thickness distribution of an organic thin film for use in an organic electroluminescence device comprises the steps of irradiating a predetermined region of the organic thin film with a light including an ultraviolet light, measuring the intensity of a fluorescence produced by the organic thin film in response to the light irradiation, and obtaining a film thickness of the predetermined region from the intensity of the fluorescence. Further, an apparatus for measuring a thickness distribution for use in an organic electroluminescence device has means for irradiating a predetermined region of the organic thin film with a light including an ultraviolet light, means for measuring the intensity of a fluorescence produced by the organic thin film, and means for obtaining the film thickness of the predetermined region from the intensity of the fluorescence.
|
申请公布号 |
US6992781(B2) |
申请公布日期 |
2006.01.31 |
申请号 |
US20030389751 |
申请日期 |
2003.03.18 |
申请人 |
PRESIDENT OF TOYAMA UNIVERSITY |
发明人 |
OKADA HIROYUKI;SHIBATA MIKI;ECHIGO TADAHIRO;NAKA SHIGEKI;ONNAGAWA HIROYOSHI |
分类号 |
H01L27/15;G01B11/06;G01B11/28;G01M11/00;G01N21/64;H01L51/50;H05B33/10 |
主分类号 |
H01L27/15 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|