| 摘要 |
PROBLEM TO BE SOLVED: To hold a stable contact between a noble metal layer and an inspection object to prolong a life of a probe needle. SOLUTION: This probe needle 21 for contacting with an electrode pad 26 to inspect an electric characteristic includes a metal body 22 serving as a core material, the oxidation-resistant noble metal layer 23 of excellent conductivity applied on an outer surface of the metal body 21, and a protection metal layer 24 applied on an outer surface of the noble metal layer 23 to protect the noble metal layer 23. The noble metal layer 23 is made of a relatively flexible material and is set to a thickness allowing deformation of the protection metal layer 24 so as to be functioned as a cushioning material for the protection layer 24. A tip face of the probe needle 21 is cut flatly, and is set to be naked under the condition where the metal body 22, the noble metal metal layer 23 and the protection metal layer 24 are a coplanar. The noble metal metal layer 23 is set to a thickness capable of contacting with the electrode pad 26 to secure sufficient continuity. COPYRIGHT: (C)2006,JPO&NCIPI
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