| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electronic component mounting apparatus that can suppress vibration and deformation of a stator in case when a shaft-motor type linear motor is used to move a transfer head. <P>SOLUTION: The electronic component mounting apparatus 1 is equipped with a transfer head 12 to transfer electronic components, an X-axis linear motor 7 to move the transfer head 12 in X-axis direction while holding it, an X-axis beam member 6 that supports the X-axis linear motor 7 and extends in the X-axis direction, and a Y-axis linear motor 3 to move the transfer head 12 together with the X-axis beam member 6 in Y-axis direction vertical to the moving direction of the X-axis linear motor 7. The X-axis linear motor 7 is provided with a shaft-like stator 7a that extends in the X-axis direction and of which both ends are supported by the X-axis beam member 6, and a moving member 7b that is provided on the transfer head 12 surrounding the stator 7a and moves along the stator 7a. It is also provided with a tension giving member to give tension to the stator 7a. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
