| 摘要 |
PROBLEM TO BE SOLVED: To improve responsiveness following tactile presentation in a medical field, such as microscopic operation and cancer diagnosis, and a virtual environment embodiment field, by providing a tactile sensor for simultaneously sensing pressure and heat and a method for manufacturing the tactile sensor. SOLUTION: A pattern for forming the support block of a force sensor and that for forming piezoelectric resistance in a thermal sensor are formed on the lower and upper surfaces, respectively, of a wafer. The piezoelectric resistance is formed on the upper surface of the wafer, an oxide film is deposited on it, a contact hole is formed at the upper portion of the piezoelectric resistance, a pattern for forming a line hole is formed on the oxide film at the other side of the thermal sensor, a metal line, a metal wire for measuring temperature, and a heater are formed on the upper surface of the wafer, oxide is deposited at the upper side of the metal line, the metal wire for measuring temperature, and the heater, a load block is formed on it via deposition and etching, and the lower surface of the wafer formed in the load block is etched, thus forming the support block of the force sensor. COPYRIGHT: (C)2006,JPO&NCIPI |
