| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vibration actuator capable of attaining stabilized drive characteristics even in case of a stator deforming through bonding by heating while reducing the time and effort of post-processing for assuring flatness, and to provide its manufacturing process. <P>SOLUTION: A stator 3 has a resilient body 31, a piezoelectric body 32 and a support 35 wherein the resilient body 31 is bonded to the piezoelectric body 32 and a comb tooth traveling oscillatory wave is generated on the contact surface 31a through excitation of the piezoelectric body 32. The contact surface 31a of the resilient body 31 is mirror finished with center-line mean roughness of 1 μm or less and covered with Nip plating (coating layer) containing PTFE. A rotor 4 has a rotor parent material 41 and a sliding material 42 wherein the rotor parent material 41 has a hammer portion 41a bonded with the sliding material 42 at the lower part, a portion 41c being connected with a moving target object, and a fillet portion 41b for coupling the hammer portion 41a and the connecting portion 41c, and rigidity at the fillet portion 41b is lower than that at the hammer portion 41a and the connecting portion 41c. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
