| 摘要 |
PROBLEM TO BE SOLVED: To provide a planar type actuator which is miniaturized by furnishing a light detection means which detects the swing state of a movable plate. SOLUTION: The planar type actuator comprises a movable plate 1 which is rockably journaled with a torsion bar 5 on a fixing part 4, a driving means 2 which drives the movable plate 1, and a light detection means 3 which detects the rocking state of the movable plate 1 on the basis of the receiving light intensity variation of detected light, and the light detection means 3 is so arranged that the movable plate 1 crosses the detected light. COPYRIGHT: (C)2006,JPO&NCIPI
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