APPARATUS AND METHODS OF MAKING NANOSTRUCTURES BY INDUCTIVE HEATING

摘要

An apparatus and methods for making nanostructures. In one embodiment, the apparatus has a process chamber having a reaction zone, a conductive susceptor with catalysts placed in the reaction zone, means for providing a time-dependent electromagnetic field in the reaction zone so as to induce a current in the conductive susceptor to generate a heat flow, and means for supplying a carbon-containing gas to the reaction zone under a set of conditions to interact with the catalysts to allow nanostructures to be formed.