SUBSTRATE TREATMENT DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a substrate treatment device which can improve pressure withstanding property of the substrate constituting an image display device. SOLUTION: The substrate treatment device comprises a vacuum chamber 30 capable of housing a treatment object substrate 33; a treatment electrode 34 arranged capable of facing the treatment object substrate 33 in the vacuum chamber 30; an electric field impressing mechanism 35 which impresses the electric field to between the treatment object substrate 33 and the treatment electrode 34; a cleaning medium 41 installed capable of contacting the surface 34A of the treatment electrode; and a movement mechanism 42 which moves the cleaning medium 41 along the surface 34A of the treatment electrode. COPYRIGHT: (C)2006,JPO&NCIPI