| 摘要 |
PROBLEM TO BE SOLVED: To provide a deaerator capable of flexibly responding to various amounts of treatment liquid, kinds of the treatment liquid, properties of the treatment liquid and a feeding method of the treatment liquid by one deaerator. SOLUTION: In the deaerator, two or more deaeration elements provided with a joint member having couplings connected to both ends and comprising one or two gas permeable tubes are arranged in one vacuum chamber. The deaerator is characterized in that two or more liquid outlets of the deaeration elements are connected to each other in parallel and the liquid inlets are not connected to each other but are independent respectively. COPYRIGHT: (C)2006,JPO&NCIPI
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