| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a load lock and dry vacuum pump assembly for performing low pressure exhaustion of a load lock chamber at low cost without depending on batch processing. <P>SOLUTION: The assembly comprises the load lock having a load lock housing 15; a dry vacuum pump 12 including a shaft, a rotor and first and second concentric cylinders extending outward from the rotor and integrally connected to a connection system, the first and second dry vacuum pump concentric cylinders, the flanged cylinder and the cylinder arranged concentric with the flanged cylinder being arranged on the shaft in the axial direction; and a molecular suction compression stage selectively provided on the first and second concentric cylinders, the flanged cylinder or the cylinder arranged concentric with the flanged cylinder and formed with a flange having a spiral structure. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
