| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for scattering a granular material, which has a nozzle of a simple structure and in which a pipeline to the nozzle is simplified. SOLUTION: A hole 10 is arranged on the upper wall surface of the pipeline of the nozzle 1 for dropping the granular material in the pipeline. A partition plate 11 is arranged in the pipeline for diffusing the granular material dropped in the pipeline from the hole 10 in the pipeline and feeding the diffused granular material to the side of an outflow opening 1b of the nozzle 1. As a result, the granular material is diffused by the partition plate 11 and the diffused granular material is scattered from the outflow opening 1b. When a substrate is placed under the outflow opening, the diffused granular material is scattered uniformly on the whole surface of the substrate. COPYRIGHT: (C)2005,JPO&NCIPI
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