| 发明名称 |
MATERIAL CARBURETOR FOR ORGANIC METAL CHEMICAL VAPOR PHASE DEPOSITION EQUIPMENT |
| 摘要 |
<p>A material carburetor (9) for organic metal chemical vapor phase deposition equipment is provided with (i) an application port (14) for applying a liquid material (13), (ii) an orifice (8) having a hole diameter which can keep a vapor pressure of a solid material (10) in the carburetor (9) actually fixed at the time of vaporizing the sold material (10) which is left after removing a solvent included in the liquid material (13), and (iii) a heater (7).</p> |
| 申请公布号 |
WO2005087975(A1) |
申请公布日期 |
2005.09.22 |
| 申请号 |
WO2005JP03877 |
申请日期 |
2005.03.07 |
| 申请人 |
NATIONAL UNIVERSITY CORPORATION NARA INSTITUTE OF;OKAMURA, SOICHIRO;SHIOSAKI, TADASHI |
发明人 |
OKAMURA, SOICHIRO;SHIOSAKI, TADASHI |
| 分类号 |
H01L21/31;C23C16/448;(IPC1-7):C23C16/448 |
主分类号 |
H01L21/31 |
| 代理机构 |
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代理人 |
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