| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate manufacturing apparatus capable of being miniaturized by a simple constitution, capable of forming a thin film excellent in thickness uniformity and enhanced in flatness and suitably adapted to the manufacture of an electronic display device such as an organic EL display device or the like. SOLUTION: In the substrate manufacturing apparatus used in a process for forming a thin film such as an organic layer or the like in the organic EL element by bonding liquid droplets to a substrate and irradiating the liquid droplet applied substrate with electromagnetic waves such as infrared rays or the like, the indicated region corresponding to the center parts of the liquid droplets or the peripheral parts or the like thereof are selectively irradiated with the electromagnetic waves. COPYRIGHT: (C)2005,JPO&NCIPI
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