BUBBLER FOR SUBSTRATE PROCESSING

摘要

A bubbler (820) includes a main body (900), a cover member and a transition member (915). The main body (900) is made of aluminum and defines a first inner surface (902) of a cavity (904). The cover member is also made of aluminum and defines a second inner surface of the cavity (904). The cover member has a carrier gas inlet (920), a liquid source inlet (922), and a source outlet (923). The transition member (915) is made of stainless steel and has a transition outer surface (944) and a transition inner surface (916), the transition inner surface (916) being aluminum cladded.