Slurry Composition for Chemical Mechanical Polishing of Oxide with Enhanced Polishing Performance,申请号KR20020080226-传众专利搜索

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发明名称	Slurry Composition for Chemical Mechanical Polishing of Oxide with Enhanced Polishing Performance
摘要
申请公布号	KR100497410(B1)	申请公布日期	2005.06.28
申请号	KR20020080226	申请日期	2002.12.16
申请人		发明人
分类号	C09K3/14;(IPC1-7):C09K3/14	主分类号	C09K3/14
代理机构		代理人
主权项
地址

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