ELECTRON BEAM DRAWING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an electron beam drawing device provided with an objective lens and a simple structure having high temperature stability. SOLUTION: The electron beam drawing device includes a forming lens for forming an image of an electron beam to a forming aperture, a reduction lens for reducing the size of the formed electron beam image, and the objective lens for forming the electron beam image located on a board. The device is provided with a temperature control unit of a lens control board of the objective lens. The temperature control unit is configured such that a thermal insulation case surrounds the lens control board for controlling the objective lens, and a control element (Peltier element) provided to the thermal insulation case controls the temperature inside the thermal insulation case. COPYRIGHT: (C)2005,JPO&NCIPI