发明名称 |
Substrate processing apparatus and substrate processing method |
摘要 |
A camera is fixed to a camera fixture extending forward and upward from a rear end of an arm mechanism. The camera picks up the direction of extension of the arm mechanism when the substrate is carried in and out. If a normal still image in a hot plate unit previously recorded and a still image picked up by the camera coincide with each other, a substrate transport robot TR carries in and out the substrate.
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申请公布号 |
US2005123386(A1) |
申请公布日期 |
2005.06.09 |
申请号 |
US20040005578 |
申请日期 |
2004.12.06 |
申请人 |
DAINIPPON SCREEN MFG. CO., LTD. |
发明人 |
NISHIMURA JOICHI;OTANI MASAMI |
分类号 |
H01L21/677;B65G49/07;H01L21/00;H01L21/68;H01L21/687;(IPC1-7):H01L21/00 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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