| 摘要 |
PROBLEM TO BE SOLVED: To provide a direct exposing system capable of easily determining and setting an exposing condition, and to provide a user interface. SOLUTION: The direct exposing system 1 comprises a data mask 11 as a data object including writing data, and a control mask 12 as a data object composed of at least one layer of logical layers 20-1, 20-2, 20-3 in which information with regard to the exposing condition applied according to a region on a substrate 2 is defined. The direct exposing process is executed with the use of consolidated data 13 created by combining a data mask 11 and a control mask 12. COPYRIGHT: (C)2005,JPO&NCIPI
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