Mirror arrangement for reflecting electromagnetic radiation comprises an active layer made of a ferroelectric material, a piezoelectric material, a magnetostrictive material, a electrostrictive material, and/or a shape memory alloy

摘要

Mirror arrangement (1) for reflecting electromagnetic radiation comprises a substrate (3) having a mirror side (5) with a mirror surface (11) facing the radiation to be reflected and a rear side (7) facing away from the mirror side, and an actuator arrangement attached to the rear side of the substrate to produce deformation of the mirror body. The actuator arrangement has at least one active layer (13) joined to a region of the rear side of the substrate. The active layer has different layer thicknesses (b1, b2) in at least two locations (I, II) arranged a distance apart within this region. The active layer is made of at least one ferroelectric material, one piezoelectric material, one magnetostrictive material, one electrostrictive material, and/or a shape memory alloy. Independent claims are also included for: (1) Production of the above mirror arrangement; (2) Optical system with a number of optical elements of which at least one is the above mirror arrangement; and (3) Lithographic process for producing miniaturized components with an exposure system.