| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method for an inkjet recording head which can carry out stable ink ejection even at the time of small liquid droplet recording. SOLUTION: The manufacturing method for the inkjet recording head in which ink liquid droplets are discharged perpendicularly to a substrate face with a heating resistor includes at least a process of forming an ink passage on the substrate by a soluble first resin layer so that the heating resistor is located at its bottom part, a process of forming a coating resin layer on the first resin layer, a process of forming an ink discharge opening at a corresponding part perpendicularly above the heating resistor of the coating resin layer, a process of further forming a soluble second resin layer onto the coating resin layer, a process of eluting the first and the second resin layers, a process of forming an ink repellent agent layer on the coating resin layer, and a process of forming an ink discharge opening of the same size as that of the ink discharge opening formed in the coating resin layer to the ink repellent agent layer. COPYRIGHT: (C)2005,JPO&NCIPI
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