| 摘要 |
PROBLEM TO BE SOLVED: To provide a joined body comprising a substrate, particularly, a very thin substrate having a thickness of less than 0.3 mm and a retaining substrate, wherein the substrate is separably joined indirectly to the retaining substrate. SOLUTION: In the joined body, a spacing layer having a space between the substrate and the retaining substrate is incorporated, and the space is formed at least on the surface of the spacing layer directed to the substrate. COPYRIGHT: (C)2005,JPO&NCIPI |
