| 摘要 |
PROBLEM TO BE SOLVED: To improve mist eliminating efficiency, recovery efficiency of a washing solution, and regeneration efficiency of the washing solution. SOLUTION: This washing device is provided with a recovery part 6 having a recovery port 7 disposed at one end side of a substrate 3, and a blow out part 4 movable toward the one end side from the other end side of the substrate 3 while spraying the washing solution onto the surface of the substrate 3. COPYRIGHT: (C)2005,JPO&NCIPI
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