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发明名称
DIELECTRIC BARRIER DISCHARGE APPARATUS AND PROCESS FOR TREATING A SUBSTRATE
摘要
申请公布号
EP1520289(A1)
申请公布日期
2005.04.06
申请号
EP20030761149
申请日期
2003.06.19
申请人
AXCELIS TECHNOLOGIES INC.
发明人
BERRY, IVAN;JANOS, ALAN;COLSON, MICHAEL
分类号
H05H1/24;H01J37/32;H01L21/3065;(IPC1-7):H01J37/32
主分类号
H05H1/24
代理机构
代理人
主权项
地址
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