| 摘要 |
PROBLEM TO BE SOLVED: To realize high throughput, while preventing the falling of a work in a carrying device of a semiconductor wafer. SOLUTION: A work holding state of a driving device 6 is detected by suction pressure of a work holding device. Holding power 1d of the work is calculated by a work holding power detector 1 from the suction pressure of this work holding device, and this holding power 1d is acquired in an acceleration arithmetic processing part 2. Optimal acceleration to the holding power 1d at that time, is arithmetically operated with every control period T by the acceleration arithmetic processing part 2. An acceleration-deceleration pattern is formed on the basis of this arithmetically operated acceleration, and the driving device is driven at the acceleration of the acceleration-deceleration pattern simultaneously with starting to hold the work. COPYRIGHT: (C)2005,JPO&NCIPI |
