POLARIZATION PROPER INVESTIGATION METHOD, OPTICAL IMAGING SYSTEM, AND CALIBRATION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a device that has a detector section having a polarization detection means for detecting the emission polarization state of radiation emitted from an optical system and investigates the optical system in polarization proper fashion, and to provide an accessory optical imaging system and a method for calibrating the device. SOLUTION: The device has a polarization detection means having a polarizing lattice structure 4. Alternately, a device that has an element for double retraction and a polarization element connected to the later stage and performs snap-shot polarization measurement is provided. The polarizing element is suited for fully polarizing also non-quasi parallel radiation. For example, the polarization element is used for determining the influence of the polarized state of UV radiation by a micro lithography projection objective lens. COPYRIGHT: (C)2005,JPO&NCIPI