PHOSPHORUS-CONTAINING SILAZANE COMPOSITION, PHOSPHORUS-CONTAINING SILICEOUS FILM, PHOSPHORUS-CONTAINING SILICEOUS FILLER, METHOD FOR PRODUCING PHOSPHORUS-CONTAINING SILICEOUS FILM, AND SEMICONDUCTOR DEVICE

摘要

Disclosed is a phosphorus-containing siliceous material having a relative dielectric constant of 3.5 or less. Also disclosed is a phosphorus-containing silazane composition which is characterized by containing a polyalkyl silazane and at least one phosphorus compound in an organic solvent. The composition is applied to a substrate to form a film, and the thus-formed film is preliminarily fired at 50-300˚C and then fired at 300-700˚C in an inert atmosphere, thereby forming a phosphorus-containing siliceous film. The phosphorus compound is preferably a pentavalent phosphate ester or a phosphazene compound.