发明名称 |
SYSTEM AND METHOD FOR INDUCTIVE COUPLING OF AN EXPANDING THERMAL PLASMA |
摘要 |
A plasma generation system (300) is provided including a plasma generation apparatus (316) for generating thermal plasma and a plasma treatment chamber (318) external to the plasma generation apparatus (316) for receiving the thermal plasma from the plasma generation apparatus (316) and maintaining lower pressure in the plasma treatment chamber (318) than in the plasma generation apparatus (316) during plasma generation for causing the thermal plasma to expand within the plasma treatment chamber (318) and an inductor system (330, 332, 333) for inductively coupling the thermal plasma. |
申请公布号 |
WO2005006386(A2) |
申请公布日期 |
2005.01.20 |
申请号 |
WO2004US18820 |
申请日期 |
2004.06.14 |
申请人 |
GENERAL ELECTIC COMPANY;SCHAEPKENS, MARC |
发明人 |
SCHAEPKENS, MARC |
分类号 |
C23C16/00;H01J7/24;H01J37/32;H05H1/46 |
主分类号 |
C23C16/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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