| 摘要 |
PROBLEM TO BE SOLVED: To provide an accurate scanning projection aligner which realizes a high throughput by making it possible to measure an illuminance in a short time and which is hardly causing an irregularity in illuminance. SOLUTION: The scanning projection aligner which performs a scanning exposure by synchronously moving a first stage and a second stage in a scanning direction comprises a plurality of photoelectric sensors I1 to I6 arranged on the second stage and measuring an amount or an illuminance of light which travels through an illumination optics system and a partial projection optics system, a sensitivity calibration means for calibrating the sensitivity among a plurality of photoelectric sensors, and an illuminance regulating means provided to at least one of the illuminance optics system and the partial projection optics system to regulate the amount or the illuminance of light traveling through the illuminance optics system and the partial projection optics system on the basis of the value measured by the plurality of photoelectric sensors. The sensitivity calibrations among the plurality of photoelectric sensors by the sensitivity calibration means is conducted by the number of times of the measurement by the plurality of photoelectric sensors fewer than the number of plurality of photoelectric sensors. COPYRIGHT: (C)2005,JPO&NCIPI
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