| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for cleaning a ceramic member capable of removing deposit and the like from the ceramic member contaminated with the deposit and the like. SOLUTION: The method for cleaning a ceramic member comprises treating a contaminated ceramic member with an alkaline chemical with pH of 10 or more in the presence of ultrasonic wave, treating the ceramic member treated with the alkaline chemical with a given acidic chemical in the presence of ultrasonic wave, and then subjecting the ceramic member treated with the acidic chemical to heat treatment at 1,000°C or more. COPYRIGHT: (C)2005,JPO&NCIPI
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