| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a thin film member having an adequate strength and hardly causes deformation by heat. <P>SOLUTION: The method for manufacturing a thin film member 22a having support beams 15, 20 at opposite surfaces of a thin film 12, respectively, comprises steps of forming masks 13, 14 having a first pattern in one surface of a substrate 11 for forming a thin film, effecting dry etching onto the one surface of the substrate 11 using the first masks 13, 14 to form the first support beams 15, performing alignment of the other surface of the substrate 11 with reference to the first pattern in the one surface thereof, forming a second mask 17 having a second pattern in the other surface of the substrate based on the alignment, and effecting dry etching onto the other surface of the substrate 11 using the second mask 17 to form the second support beams 20. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
