发明名称 Method and apparatus for compensation of time-varying optical properties of gas in interferometry
摘要 In general, in one aspect, the invention features a method, including interferometrically measuring first and second optical path lengths to a measurement object along respective first and second paths, wherein the measurement of the optical path lengths includes directing first and second measurement beams to reflect from the measurement object, measuring propagation directions of the first and second measurement beams, compensating the first measured optical path length for time-varying optical properties of gas in the first path based on the first and second measured optical path lengths and the first and second measured propagation directions.
申请公布号 US6839141(B2) 申请公布日期 2005.01.04
申请号 US20030350522 申请日期 2003.01.24
申请人 ZYGO CORPORATION 发明人 HILL HENRY A.
分类号 G01B9/02;G01B11/00;G03F7/20;H01L21/027;(IPC1-7):G01B9/02 主分类号 G01B9/02
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