| 摘要 |
PROBLEM TO BE SOLVED: To provide an acceleration sensor for improving reliability by increasing rigidity of a movable part and improving linearity of output signals for acceleration. SOLUTION: The acceleration sensor comprises first and second fixed electrodes 2a, 2b formed on a substrate 1, a movable electrode 4 comprising a first movable electrode part, a second movable electrode part, and a connecting part of the movable electrode parts and facing the first and second fixed electrodes 2a, 2b, a movable member 5 supporting the movable electrode 4 by connecting the connecting part of the movable electrode parts to the substrate 1 so that they have an interval therebetween and being torsionally deformable, a mass body 6 arranged between the first and second movable electrode parts and displaced in a direction of board thickness of the substrate 1 in response to the acceleration, a mass body supporting member 7 supporting elastically the mass body 6 so that it has an interval between the substrate 1, and a mass body connecting member 8 connecting the connecting part of the movable electrode parts to the mass body 6. The movable member 5 is arranged on a line A-A' passing through a middle point between the first and second movable electrode parts. The mass body connecting member 8 is arranged so that it is parallel to the movable member 5 and has an interval therefrom. COPYRIGHT: (C)2005,JPO&NCIPI
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