| 摘要 |
PROBLEM TO BE SOLVED: To enable to manufacture a mechanism device superior in durability inexpensively, easily and in a short time. SOLUTION: The mechanism device 1 is provided with a lower part electrode 4 formed on a surface of an insulating substrate 6, an upper part electrode 3 of the shape of a cantilever in which its pillar part 10 is formed on the surface of the insulating substrate 6 with a prescribed distance away from the lower part electrode 4, and in which the tip end of a beam part 11 is opposed to the lower part electrode 4 by a prescribed distance apart, and a driving electrode 5 formed in the rear face region of the insulating substrate 6 which is opposed to a region between the lower part electrode 4 and the pillar part 10. COPYRIGHT: (C)2005,JPO&NCIPI
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