| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and a device for forming a film which efficiently use a material and form a high quality organic thin film, and also to provide an electronic device and an electronic apparatus manufactured using it. SOLUTION: This organic thin film forming device 10 is provided with the solution feed section 11, the gas supply part 12, the soft ionization part 13, the ion judgment part 14, the deflection part 15, and the film forming part 16. An organic material to be formed in a film is made into a minute droplet which is ionized or charged in a soft ionization part 13, then the droplet is vaporized to generate gaseous pseudo molecular ions. Organic material pseudo molecular ions are separated from the pseudo molecular ions in an ion separating part 14. Prescribed adhesion voltage is applied to a plurality of electrodes formed in an electronic device substrate on which an organic thin film is formed using a circuit formed in the electronic device substrate in advance so that the organic material pseudo molecular ions selectively adhere to a prescribed electrode. COPYRIGHT: (C)2005,JPO&NCIPI
|
