发明名称 Method of defect repairing in graytone part in graytone mask
摘要 Repairing patterns 3a' and 3b' different in width and position respectively from regular patterns 3a and 3b by partially removing a repairing film 8 in the form and/or the disposition of achieving a graytone effect equal to the graytone effect of a regular pattern after forming the repairing film 8 in an area containing clear defects.
申请公布号 US6821686(B2) 申请公布日期 2004.11.23
申请号 US20020107817 申请日期 2002.03.28
申请人 HOYA CORPORATION 发明人 NAKAYAMA KENJI
分类号 G03F1/00;G03F1/14;(IPC1-7):G03F9/00 主分类号 G03F1/00
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