发明名称 |
DISPLAY APPARATUS TO AVOID GENERATION OF HILLOCK OR WHISKER |
摘要 |
PURPOSE: A display apparatus is provided to avoid generation of hillock or whisker by using an interconnection made of aluminium. CONSTITUTION: A personal computer includes a main body, a keyboard and a display unit. The display unit includes a substrate, a layer and an insulation layer. The layer is formed on the substrate, including aluminium. The insulation layer is formed on the layer including the aluminium, composed of a silicon nitride layer. The aluminium contains carbon atoms of a density not higher than 5x10¬18 atom centimeter¬-3, oxygen atoms of a density not higher than 8x10¬18 atom centimeter¬-3 and nitrogen atoms of a density not higher than 7x10¬17 atom centimeter¬-3. |
申请公布号 |
KR100458703(B1) |
申请公布日期 |
2004.11.17 |
申请号 |
KR20020040199 |
申请日期 |
2002.07.11 |
申请人 |
SEMICONDUCTOR ENERGY LABORATORY K.K. |
发明人 |
TERAMOTO SATOSHI;YAMAZAKI SHUNPEI |
分类号 |
H01L21/285;G02F1/1343;H01L21/28;H01L21/3205;H01L21/336;H01L23/52;H01L23/532;H01L29/786;(IPC1-7):H01L21/28 |
主分类号 |
H01L21/285 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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