WAFER TRANSFERRING APPARATUS OF SEMICONDUCTOR FABRICATING EQUIPMENT TO PREVENT WAFER FROM FALLING FROM ROBOT ARM

摘要

PURPOSE: A wafer transferring apparatus of semiconductor fabricating equipment is provided to perform consecutive fabricating processes by preventing a wafer from falling from a robot arm when the wafer is transferred to a next unit by the robot arm. CONSTITUTION: An arm(2) takes out the wafer received in a carrier. One end of the arm is fixed to an operation module(3) that makes the arm move up/down and rotates with respect to a vertical axis. The operation module is fixed to the upper surface of a transfer module(4) that reciprocates the arm fixed to the operation module in the back-and-forth direction. An align unit(21) and an absorption unit are included in the arm.