| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric actuator capable of accurately detecting the vibration of a diaphragm , and further provide a device equipped with the piezoelectric actuator. <P>SOLUTION: An electrode 517A for detecting the displacement of the diaphragm 51 is provided on the opposite side of an abutting portion 513 with respect to mounting portions 515A and 515B. For this reason, contact vibration produced when the abutting portion 513 is brought into contact with a driven body 4 is not transmitted directly to the displacement detecting electrode 517A. Thus, only a detected voltage due to the piezoelectric effect arising from the vibration of the diaphragm 51 is generated on the displacement detecting electrode 517A. As mentioned above, the portion of the diaphragm 51 provided with the displacement detecting electrode 517A is positioned on the side opposite to the side where the abutting portion 513 is provided with respect to the mounting portions 515A and 515B. Therefore, deformation in the portion of the diaphragm 51 provided with the displacement detecting electrode 517A is prevented from being suppressed by the contact of the abutting portion 513 with the driven body 4 or the like. The detected voltage due to the piezoelectric effect arising from the original vibration of the diaphragm 51 is generated on the displacement detecting electrode 517A. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
