Mirror substrate for optical device, is composed of silicon carbide and silicon and including reflecting surface polished with specular finish, and sufficient Vickers hardness, thermal conductivity and resistance to flexion

摘要

The substrate has a reflecting surface polished with a specular finish. The substrate of a mirror is composed of silicon carbide (22) and silicon. The mirror has a number of pores, each with a diameter of about 40 nanometers and less. The substrate has a Vickers hardness of about 1500 and above, and a thermal conductivity of 100 W/m.k. The resistance of substrate to the flexion is about 500 MPa and more. Independent claims are also included for the following: (a) a body of a mirror in which a reflecting film is provided on the polished surface with a specular finish (b) an optical device in which the body of a mirror is used as reflecting mirror.