| 摘要 |
PROBLEM TO BE SOLVED: To allow stable measurement irrespective of a surface condition of a measured object. SOLUTION: This displacement gage has an objective lens 15 for conducting projection to the measured object 16, an excitation part for vibrating the objective lens 15 with a prescribed amplitude along an optical axis direction of light passing through the objective lens 15, and a position detecting part for detecting a position of the objective lens 15, an objective lens scanning part 52 for moving the objective lens 15 along a plane orthogonal to the optical axis direction, and an objective lens motion detecting part 53 for detecting a moved position of the objective lens 15. The gage is provided further a processing part 58 for computing a variation distribution within a measuring area, based on positional information of the objective lens 15 within the measuring area detected by the objective lens motion detecting part 53, and based on variations measured in a plurality of measuring points, and an output part for outputting a result computed by the processing part 58. COPYRIGHT: (C)2005,JPO&NCIPI
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