MANIPULATOR AND PROBE DEVICE, SAMPLE FABRICATING DEVICE AND SAMPLE OBSERVING DEVICE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a manipulator for improving the operating rate of a device by shortening a time for stopping the device during replacing a probe. SOLUTION: An air lock room is provided in a vacuum chamber and the air lock room is connected to the vacuum chamber of a body with a vacuum bellows. A probe holder is mounted in the air lock room so that the probe is moved together with the air lock room by a moving mechanism provided on the body. The air lock chamber is evacuated through an exhaust port and the air lock room is partitioned from the vacuum chamber with a vacuum valve. The probe has a second moving mechanism so that it can be moved between the air lock room and the vacuum chamber. COPYRIGHT: (C)2005,JPO&NCIPI