| 摘要 |
PROBLEM TO BE SOLVED: To recover brittle material fine particles in an aerosol which do not participate in the formation of a structure in an aerosol deposition method. SOLUTION: In the mechanism device, an aerosol obtained by dispersing brittle material fine particles into a gas is sprayed from a nozzle toward a substrate to form a structure of the brittle material on the substrate, further, the aerosol which has been collided against the substrate and did not participate in the formation of the structure is introduced into a powder suction cylinder, and the brittle material fine particles and gas in the aerosol which did not participate in the formation of the structure are separated to recover the fine particles in a powder recovery vessel installed in the downstream thereof. The fine particles can more efficiently be recovered by allowing the shape, installation method and driving of the suction cylinder to follow the movement of the spray nozzle. COPYRIGHT: (C)2005,JPO&NCIPI
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